Development of plasma technology at the University of Malaya

Authors

• C.S. Wong
• S.P. Moo
• A.C. Chew
• S. Lee

Document Type

Article

Publication Date

1-1-1999

Abstract

In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.

Keywords

Plasma Technology

Publication Title

Jurnal Fizik Malaysia

ISSN

0128-0333

Recommended Citation

Wong, C.S.; Moo, S.P.; Chew, A.C.; and Lee, S., "Development of plasma technology at the University of Malaya" (1999). Pre-2000. 1302.
https://knova.um.edu.my/research_publications_pre2000/1302

Divisions

fac_med

Volume

19

Issue

3

Additional Information

University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory