Development of plasma technology at the University of Malaya
Document Type
Article
Publication Date
1-1-1999
Abstract
In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.
Keywords
Plasma Technology
Divisions
fac_med
Publication Title
Jurnal Fizik Malaysia
Volume
19
Issue
3
Additional Information
University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory
COinS