Radio frequency magnetron sputtering growth of Ni-doped ZnO thin films with nanocolumnar structures
Document Type
Article
Publication Date
10-1-2024
Abstract
This study describes the RF magnetron sputtering growth of nickel (Ni) doped zinc oxide (ZnO) thin films with nanocolumns (NCs) structures. Using a nickel seed layer, homogeneous and vertically aligned ZnO nanocolumns with a diameter of around 30 nm were successfully grown. The X-ray diffraction (XRD) results confirmed the incorporation of Ni atoms into the ZnO lattice, producing single crystalline structures without secondary phases. High-resolution transmission electron microscopy showed clear lattice planes with a d-spacing value of 3.243 & Aring; corresponding to the wurtzite phase of ZnO. Optimal crystalline quality was achieved by growing the films at 300 degrees C followed by thermal annealing at 300-500 degrees C in an oxygen ambient.
Keywords
Nanocolumnar, Nickel seed layer, Catalyst, Magnetron sputtering, Dopant
Divisions
PHYSICS
Funders
Ministry of Education, Malaysia (A305-KR-AKH002-0000000435-K134),Universiti Sains Malaysia, Research University Individual (RUI) Special Grant Scheme (UO2027) ; (2022/0031) ; (1001/CINOR/8011141)
Publication Title
Journal of Crystal Growth
Volume
644
Publisher
Elsevier
Publisher Location
RADARWEG 29, 1043 NX AMSTERDAM, NETHERLANDS