Detection of atoms sputtered from surfaces

Document Type

Article

Publication Date

1-1-1995

Abstract

The energy distributions of sputtered atoms and ions produced by few hundred to few thousand eV ion bombardment by both atomic and molecular ion beams of polycrystalline and crystalline targets by has been measured. The energy distributions of the ions and atoms are found to be different and quite complex. The distributions provide information about the basic sputtering mechanisms which occur in plasma-surface interactions.

Keywords

Atoms, Crystals, Energy transfer, Ion bombardment, Plasma applications, Polycrystals, Sputtering, Surface properties, Energy distribution, Solid state physics

Divisions

PHYSICS

Publication Title

Key Engineering Materials

Volume

99-100

Publisher

Trans Tech Publications

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