Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator

Document Type

Article

Publication Date

9-1-2022

Abstract

This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching (MACE) for heat dissipation enhancement to improve the performance of the micro-thermoelectric generator (mu-TEG). The heat dissipation through the micro-heat sink is enhanced by increasing the surface-to -volume ratio, which can be achieved by combining deep reactive ion etching (RIE) and MACE. Silicon nano -wires with a diameter of 100 nm and a height of 9 mu m are successfully formed in both horizontal and vertical surface directions. The micro-heat sink effectiveness is 8.3 times better than that of without employing the micro -heat sink. In addition, the performance of the mu-TEG has been significantly enhanced by utilizing the micro-heat sink. The maximum output power of the mu-TEG with and without the micro-heat sink are 93 mu W and 18.5 mu W, respectively, under the same evaluation conditions. The findings in this work may be useful not only for the mu-TEG, but also other applications such as micro-supercapacitors, micro-sensors, chemical analysis, and bio-logical processes, which require a large surface-to-volume ratio.

Keywords

Micro-heat sink, Micro-thermoelectric generator, Metal-assisted chemical etching, Deep reactive ion etching, Surface-to-volume ratio

Publication Title

Energy Conversion and Management

Divisions

mechanical

Funders

Cabinet Office, Government of Japan, Cross -ministerial Strategic Innovation Promotion Program (SIP),New Energy and Industrial Technology Development Organization (NEDO),Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT) Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research (KAKENHI) (Grant No: 20K15147)

Volume

267

Publisher

Elsevier

Publisher Location

THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND

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