Composition and optical property controlled in In 2 O 3 /W 2 N nanostructure composites by nitrogen plasma assisted in-situ thermal annealing
Document Type
Article
Publication Date
1-1-2017
Abstract
In2O3/W2N nanostructure composites were grown by nitrogen plasma assisted in-situ thermal annealing at different hot-filament temperatures, Tf. The in-situ thermal annealing changes the as-grown In2O3 nanostructure to In2O3/W2N nanostructure composite with decreasing the grain size from 200 to 300 nm to ~ 100 nm. The optical spectroscopy results indicate that the optical energy gap of the nanostructure composites (3.7–2.7 eV) can be effectively tailored by monotonically increasing the W2N incorporation. The formation of W2N is attributed to the high energetic ion bombardment of N adatoms and incorporation of W adatoms. Furthermore, the effects of the filament temperature, Tf on the compositions in relation with the optical properties of the nanostructure composite are discussed.
Keywords
Nanostructure composite, W2N, Evaporation, Nitrogen ion bombardment, Optical energy gap
Divisions
PHYSICS
Funders
University of Malaya High Impact Research Chancellery Grant of UM.C/625/1/HIR/237,University of Malaya Postgraduate Research Fund (PPP) of PG073-2015A
Publication Title
Materials Science in Semiconductor Processing
Volume
68
Publisher
Elsevier