Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
Document Type
Article
Publication Date
1-1-2012
Abstract
Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved.
Keywords
micromechanics nanostructured materials fracture non-ferrous alloys nickel-phosphorus coatings mechanical-properties indentation strength specimens fabrication hardness silicon growth tests
Divisions
fac_eng
Publication Title
Thin Solid Films
Volume
520
Issue
13
Additional Information
Armstrong, D. E. J. Haseeb, A. S. M. A. Roberts, S. G. Wilkinson, A. J. Bade, K.