Dynamic dispersing technique for PR coating process in planar lightwave circuit fabrication
Document Type
Article
Publication Date
1-1-2007
Abstract
A new dynamic dispersing technique (DDT) is proposed and demonstrated to improve the photoresist (PR) coating process in planar lightwave circuit (PLC) fabrication. In this technique, the PR is dispensed during the wafer's spin cycle on the spin coaler instead of the conventional static dispensing before spinning. In comparison to the conventional static dispersing technique (SDT), DDT has significantly improved several properties of the PR layer including its thinning behavior, coating uniformity, and PR amount. Using DDT, the PR thickness averagely reduces by -0.2 μm. The radial uniformity of the PR from the centre is also improved from the average difference of 0.28 μm in SDT to 0.14 μm in DDT. Furthermore, the PR amount required for the coating process is reduced from 3.00 ml (SDT) to 0.25 ml (DDT). Two different DDTs are also compared in this paper including the application of PR during the spin cooler's acceleration step (Ist DDT) and the application of PR during the spin coaler's constant speed (2nd DDT).
Keywords
Dynamic dispensing, Photoresist (PR) coating, Planar lightwave circuit (PLC), Spin coating, Static dispensing
Divisions
fac_eng,PHYSICS
Publication Title
Microwave and Optical Technology Letters
Volume
49
Issue
8
Publisher
John Wiley & Sons