Cone evolution on VUV laser ablated polymers

Document Type

Article

Publication Date

1-1-2010

Abstract

We report on conical microstructures formed on polycarbonate and polyallyl di-glycol carbonate (CR39) ablated using 157-nm F2 laser radiation. These are distinguished by having smooth, straight walls and, for CR39, sharp tips, together with interference and diffraction fringes around their base. Etch-rate modelling of a non-planar surface and diffraction-modulated fluence is used to explore how cones may evolve, and an estimate is made of thermal loading on microcones.

Keywords

Polyimide, Etch Rate, Wall Angle, Straight Wall, Cone Evolution

Publication Title

Applied Physics A

ISSN

0947-8396

Divisions

PHYSICS

Volume

101

Issue

1

Publisher

Springer

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