Document Type
Conference Item
Publication Date
1-1-2008
Abstract
This paper describes the modeling of a microdiaphragm of a human artery biosensor by varying diaphragm's diameter and thickness. Both parameters are varied to evaluate their effects on diaphragm's deflection and pressure sensitivity. The sensor used circular silicon nitride diaphragm as a pressure sensing element. The findings indicate that the diaphragm's thickness should be small whereas the diameter should be large enough in order to achieve high sensitivity. The simulation results demonstrate that the sensor has reasonable linearity and sensitivity for the measurement ranges from 0 to 300mmHg. © 2008 Springer-Verlag.
Keywords
Deflection, diaphragm diameter, diaphragm thickness, pressure sensitivity, Design parameters, High sensitivity, Human artery, Measurement range, Pressure sensing, Pressure sensitivities, Pulse wave, Simulation result, Biomedical engineering, Biosensors, Silicon nitride, Diaphragms
Divisions
fac_eng
Volume
21 IFM
Event Title
4th Kuala Lumpur International Conference on Biomedical Engineering 2008, Biomed 2008
Event Location
Kuala Lumpur
Event Dates
2008
Event Type
conference
Additional Information
Conference code: 82241 Cited By (since 1996):1 Export Date: 29 January 2014 Source: Scopus doi: 10.1007/978-3-540-69139-6-176 Language of Original Document: English Correspondence Address: Hasikin, K.; Department of Biomedical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur, Malaysia; email: eishahasikin@gmail.com References: Dagang, G., Choon Po, S.N., Eng Hock, F.T., Design Optimization of Dual Optical fiber MEMS Pressure Sensor for Biomedical Applications (2006) Journal of Physics: Conference Series, pp. 34.1073-1078; Singh, M., Li, J.K.-J., Sigel Jr., G.H., Amory, D., (1990) Fiber Optic Pulse Sensor for Noninvasive Cardiovascular Applications IEEE; Wang, X., Li, B., Russo, O.L., Roman, H.T., Chin, K.K., Farner, K.R., (2006) Diaphragm Design Guidelines and An Optical Pressure Sensor Based on MEMS Technique Microelectronic Journal, pp. 37.50-56; Totsu, K., Haga, Y., Esashi, M., Ultra-Miniature Fiber-Optic Pressure Sensor using White Light Interferometry (2005) Journals of Micromechanics and Microengineering, pp. 15.7175; Xiao-qi, N., Ming, W., Xu-Xing, C., Yi-Xian, G., Hua, R., An Optical Fibre MEMS Pressure Sensor Using Dual Wavelength Interrogation (2006) Measurement Science and Technology, pp. 17.2401-2404; Hill, G.C., Melamud, R., Declercq, F.E., Davenport, A.A., Chan, I.H., Hartwell, P.G., Pruitt, B.L., SU-8 MEMS Fabry-Perot Pressure Sensor (2007) Sens. Actuators A:Phys; Cibula, E., Donlagic, D., Stropnik, C., (2002) Miniature Fiber Optic Pressure Sensor for Medical Application, pp. 711-714. , IEEE; Senturia, S.D., (2001) Micro System Design, , Kluwer Academic Publishers; Mansour, R.R., Bakri-Kaseem, M., Daneshmand, M., Messiha, N., (2003) RF MEMS Devices in Proceedings of the International Conference on MEMS, pp. 103-107. , NANO and Smart System; Le, H.P., Shah, K., Singh, J., Zayegh, A., Design and implementation of an optimised wireless pressure sensor for biomedical application (2006) Analog Integrated Circuits and Signal Processing, 48 (1), pp. 21-31. , DOI 10.1007/s10470-006-8118-5; Suster, M., Ko, W.H., Young, D.J., An Optically Powered Wireless Telemetry Module for High-Temperature MEMS Sensing and Communication (2004) Journal of Micro ElectroMechanical System, pp. 13.536-541; Eaton, W.P., Bitsie, F., Smith, J.H., Plummer, D.W., A New Analytical Solution for Diaphragm Deflection and Its Application to a Surface-Micromachined Pressure Sensor International Conference on Modeling and Simulation of Microsystem; Xu, J., (2005) High Temperature High Bandwidth Fiber Optic Pressure Sensors, , Dissertation submitted Virginia Polytechnic Institute, Dec, 2005; Giovanni, M.D., (1982) Flat and Corrugated Diaphragm Design Handbook, , Marcel Dekker, Inc; Soin, N., Majlis, B.Y., An Analytical Study on Diaphragm Behavior for Micro-machined Capacitive Pressure Sensor (2002) ICSE Proc.; Madssen, E., Haere, P., Wiseth, R., Radial Artery Diameter and Vasodilatory properties After Transradial Coronary Angiography (2006) Ann Thorac Surg, pp. 82.1698-1703; Osika, W., Dangardt, Gronros, Lundstam, U., Myredal, A., Johansson, M., Volkmann, R., Friberg, P., Increasing Peripheral Artery Intima Thickness from Childhood to Seniority (2007) Journal of the American Heart Association