Microelectrode fabrication using Indium Tin Oxide (ITO) for microfluidic devices employing dielectrophoresis
Document Type
Article
Publication Date
1-1-2008
Abstract
Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles' dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient. © 2008 Springer-Verlag.
Keywords
Dielectrophoresis indium tin oxide lab on a chip Microelectrode DEP force Electric field gradients Fabrication process Field gradient Micro-fluidic devices Microelectrode fabrication Microelectromechanical systems Paper documents University of Surrey Biomedical engineering Electric fields Electrophoresis Indium Indium compounds Microelectrodes Microelectromechanical devices Surface defects Tin Tin oxides Conductive films
Divisions
fac_eng
Publication Title
Biomeds
Volume
21 IFM
Additional Information
Conference code: 82241 Export Date: 11 December 2012 Source: Scopus doi: 10.1007/978-3-540-69139-6-179 Language of Original Document: English Correspondence Address: Kadri, N. A.; University of Surrey, Centre of Biomedical Engineering, Guildford, Surrey, United Kingdom; email: n.kadri@surrey.ac.uk References: Pethig, R., Markx, G.H., Applications of dielectrophoresis in biotechnology (1997) Trends Biotechnol, 15, pp. 426-432; Ramos, A., Morgan, H., Green, N.G., Castellanos, A., Ac electrokinetics: A review of forces in microelectrode structures (1998) Journal of Physics D: Applied Physics, 31 (18), pp. 2338-2353. , PII S0022372798902509; Green, N.G., Ramos, A., Morgan, H., AC electrokinetics: A survey of submicrometre particle dynamics (2000) J Phys D: Appl Phys, 33, pp. 632-641; Hughes, M.P., AC electrokinetics: Applications for nanotechnology (2000) Nanotechnology, 11, pp. 124-132; Fiedler, S., Shirley, S.G., Schnelle, T., Fuhr, G., Dielectrophoretic sorting of particles and cells in a microsystem (1998) Analytical Chemistry, 70 (9), pp. 1909-1915; Wang, X.B., Huang, Y., Gascoyne, P.R.C., Dielectrophoretic manipulation of particles (1997) IEEE Trans Industry Appl, 33, pp. 660-669; Schnelle, T., Muller, T., Gradl, G., Paired microelectrode system: Dielectrophoretic particle sorting and force calibration (1999) J Electrostatics, 47, pp. 121-132